Target debonded

in #semicon4 years ago

Last week , a tool in our production line ran into problem , failing some parameters constantly.

So we decided to open the chamber and perform the inspection.

debonded04.jpg

Found out the target (tantalum) had been debonded. From surface it looks like uneven surface. Looks like patch by patch over the target.

debonded03.jpg

Back of the target hardly see any abnormaliy.

debonded01.jpg

Possible root cause maybe the shaft area, further investigation still on-going though.

debonded02.jpg